Publication detail

Precise determination of thermal parameters of a microbolometer

SVATOŠ, V. GABLECH, I. PEKÁREK, J. KLEMPA, J. NEUŽIL, P.

Original Title

Precise determination of thermal parameters of a microbolometer

Type

journal article in Web of Science

Language

English

Original Abstract

Determination of microbolometer thermal properties such as thermal capacitance, conductance, time constant, and IR responsivity is of the utmost importance as they directly influence microbolometer performance. Here we show a technique to measure them by using a minimized self-heating effect, thus leading to their precise determination via measurements based on an AC-biased Wheatstone bridge containing a microbolometer. The bridge outputs were subtracted from each other by a differential voltage preamplifier with its output processed by a lock-in amplifier. The lock-in amplifier output as a function of the amplitude of AC bias provided an amplitude of microbolometer thermal conductivity. A microbolometer temperature response to pulse irradiation of its membrane provided the value of its thermal time constant and, thus, its thermal capacitance. Finally, we also extracted microbolometer responsivity using a blackbody IR source. The method was experimentally verified using a micromachined bolometer, which showed excellent agreement with the analytical solution.

Keywords

Microbolometer; MEMS; Thermal parameters; Lock-in amplifier; IR response

Authors

SVATOŠ, V.; GABLECH, I.; PEKÁREK, J.; KLEMPA, J.; NEUŽIL, P.

Released

1. 9. 2018

ISBN

1350-4495

Periodical

INFRARED PHYSICS & TECHNOLOGY

Year of study

93

Number

NA

State

Kingdom of the Netherlands

Pages from

286

Pages to

290

Pages count

5

URL

https://www.sciencedirect.com/science/article/pii/S1350449518303049

BibTex

@article{BUT149037,
  author="Vojtěch {Svatoš} and Imrich {Gablech} and Jan {Pekárek} and Jaroslav {Klempa} and Pavel {Neužil}",
  title="Precise determination of thermal parameters of a microbolometer",
  journal="INFRARED PHYSICS & TECHNOLOGY",
  year="2018",
  volume="93",
  number="NA",
  pages="286--290",
  doi="10.1016/j.infrared.2018.07.037",
  issn="1350-4495",
  url="https://www.sciencedirect.com/science/article/pii/S1350449518303049"
}