Publication detail

Influence of Critical Flow in the Differentially Pumped Chamber AQUASEM

HLAVATÁ, P. MAXA, J. BÍLEK, M. LEPLTOVÁ, K. BAYER, R.

Original Title

Influence of Critical Flow in the Differentially Pumped Chamber AQUASEM

English Title

Influence of Critical Flow in the Differentially Pumped Chamber AQUASEM

Type

journal article

Language

en

Original Abstract

The article deals with the effect of the critical flow, which is produced at pumping of the differential pumping chamber of the Environmental Scanning Electron Microscope (ESEM). The article compares the state of the flow in the area of pumped chamber at pressure ratio on the apertures when the critical flow occurs and its advantages in design of the chambers versus the flow without the clogging the nozzle. Problematics were solved using finite volume method by Ansys Fluent system.

English abstract

The article deals with the effect of the critical flow, which is produced at pumping of the differential pumping chamber of the Environmental Scanning Electron Microscope (ESEM). The article compares the state of the flow in the area of pumped chamber at pressure ratio on the apertures when the critical flow occurs and its advantages in design of the chambers versus the flow without the clogging the nozzle. Problematics were solved using finite volume method by Ansys Fluent system.

Keywords

ANSYS Fluent, differentially pumped chamber, ESEM, SolidWorks

Released

21.12.2017

Publisher

University of Defence

Location

Brno

Pages from

301

Pages to

310

Pages count

10

BibTex


@article{BUT140368,
  author="Pavla {Šabacká} and Jiří {Maxa} and Michal {Bílek} and Robert {Bayer} and Petr {Vyroubal}",
  title="Influence of Critical Flow in the Differentially Pumped Chamber AQUASEM",
  annote="The article deals with the effect of the critical flow, which is produced at pumping of the differential pumping chamber of the Environmental Scanning Electron Microscope (ESEM). The article compares the state of the flow in the area of pumped chamber at pressure ratio on the apertures when the critical flow occurs and its advantages in design of the chambers versus the flow without the clogging the nozzle. Problematics were solved using finite volume method by Ansys Fluent system.",
  address="University of Defence",
  chapter="140368",
  doi="10.3849/aimt.01201",
  howpublished="print",
  institution="University of Defence",
  number="2",
  year="2017",
  month="december",
  pages="301--310",
  publisher="University of Defence",
  type="journal article"
}