Publication detail

Design of the shape of the experimental chamber for the analysis of the pressure layout in the differential pumped chamber

HÁJKOVÁ, V. MAXA, J. HLAVATÁ, P. BÍLEK, M.

Original Title

Design of the shape of the experimental chamber for the analysis of the pressure layout in the differential pumped chamber

English Title

Design of the shape of the experimental chamber for the analysis of the pressure layout in the differential pumped chamber

Type

conference paper

Language

en

Original Abstract

This article is based on a study by Dr. Danilatos, where pumping of the differential pumped chamber is solved using the Monte Carlo statistical method. Similar results were obtained using the Ansys Fluent system. Theoretical computations as Dr. Danilatos and comparative studies are performed on theoretical shape. Simulations were made to obtain the shape of an experimental chamber with complete pumping shapes so that its shaping and pumping would ensure such a flow of gas in order to ensure the same distribution of pressure in the experimental chamber in the area under investigation as in the theoretical shape.

English abstract

This article is based on a study by Dr. Danilatos, where pumping of the differential pumped chamber is solved using the Monte Carlo statistical method. Similar results were obtained using the Ansys Fluent system. Theoretical computations as Dr. Danilatos and comparative studies are performed on theoretical shape. Simulations were made to obtain the shape of an experimental chamber with complete pumping shapes so that its shaping and pumping would ensure such a flow of gas in order to ensure the same distribution of pressure in the experimental chamber in the area under investigation as in the theoretical shape.

Keywords

Dr. Danilatos, Monte Carlo, ANSYS Fluent, differentially pumped chamber, environmental scanning electron microscope

Released

30.11.2017

ISBN

978-80-214-5109-4

Book

ECS Transactions

Pages from

329

Pages to

336

Pages count

6

BibTex


@inproceedings{BUT140329,
  author="Vlastimila {Hájková} and Jiří {Maxa} and Pavla {Šabacká} and Michal {Bílek}",
  title="Design of the shape of the experimental chamber for the analysis of the pressure
layout in the differential pumped chamber",
  annote="This article is based on a study by Dr. Danilatos, where pumping of the
differential pumped chamber is solved using the Monte Carlo statistical
method. Similar results were obtained using the Ansys Fluent system.
Theoretical computations as Dr. Danilatos and comparative studies are
performed on theoretical shape. Simulations were made to obtain the shape of
an experimental chamber with complete pumping shapes so that its shaping
and pumping would ensure such a flow of gas in order to ensure the same
distribution of pressure in the experimental chamber in the area under
investigation as in the theoretical shape.",
  booktitle="ECS Transactions",
  chapter="140329",
  doi="10.1149/08101.0329ecst",
  howpublished="online",
  year="2017",
  month="november",
  pages="329--336",
  type="conference paper"
}