Publication detail

Design of the shape of the experimental chamber for the analysis of the pressure layout in the differential pumped chamber

HÁJKOVÁ, V. MAXA, J. HLAVATÁ, P. BÍLEK, M.

Original Title

Design of the shape of the experimental chamber for the analysis of the pressure layout in the differential pumped chamber

Type

conference paper

Language

English

Original Abstract

This article is based on a study by Dr. Danilatos, where pumping of the differential pumped chamber is solved using the Monte Carlo statistical method. Similar results were obtained using the Ansys Fluent system. Theoretical computations as Dr. Danilatos and comparative studies are performed on theoretical shape. Simulations were made to obtain the shape of an experimental chamber with complete pumping shapes so that its shaping and pumping would ensure such a flow of gas in order to ensure the same distribution of pressure in the experimental chamber in the area under investigation as in the theoretical shape.

Keywords

Dr. Danilatos, Monte Carlo, ANSYS Fluent, differentially pumped chamber, environmental scanning electron microscope

Authors

HÁJKOVÁ, V.; MAXA, J.; HLAVATÁ, P.; BÍLEK, M.

Released

30. 11. 2017

Publisher

Electrochemical Society Inc.

ISBN

9781607688297

Book

ECS Transactions

Edition

81

Edition number

1

ISBN

1938-5862

Periodical

ECS Transactions

Year of study

81

Number

1

State

United States of America

Pages from

329

Pages to

335

Pages count

5

URL

https://iopscience.iop.org/article/10.1149/08101.0329ecst/pdf

BibTex

@inproceedings{BUT140329,
  author="Vlastimila {Hájková} and Jiří {Maxa} and Pavla {Šabacká} and Michal {Bílek}",
  title="Design of the shape of the experimental chamber for the analysis of the pressure
layout in the differential pumped chamber",
  booktitle="ECS Transactions",
  year="2017",
  series="81",
  journal="ECS Transactions",
  volume="81",
  number="1",
  pages="329--335",
  publisher="Electrochemical Society Inc.",
  doi="10.1149/08101.0329ecst",
  isbn="9781607688297",
  issn="1938-5862",
  url="https://iopscience.iop.org/article/10.1149/08101.0329ecst/pdf"
}