Publication detail

Impact of the shape of the differentially pumped chamber on critical flow character

HLAVATÁ, P. MAXA, J. BÍLEK, M. VYROUBAL, P.

Original Title

Impact of the shape of the differentially pumped chamber on critical flow character

English Title

Impact of the shape of the differentially pumped chamber on critical flow character

Type

conference paper

Language

en

Original Abstract

The article deals with the impact of the shape of the differential pumped chamber of the Environmental electron microscope on resultant value of average Normalized density number on the path of the primary electron beam which has directly proportional influence on the dispersion of this beam and thereby influence on sharpness resulting image. Analysis were made using finite volume method in Ansys Fluent system with the respect to critical flow created behind the aperture which separates differential pumped chamber from specimen chamber.

English abstract

The article deals with the impact of the shape of the differential pumped chamber of the Environmental electron microscope on resultant value of average Normalized density number on the path of the primary electron beam which has directly proportional influence on the dispersion of this beam and thereby influence on sharpness resulting image. Analysis were made using finite volume method in Ansys Fluent system with the respect to critical flow created behind the aperture which separates differential pumped chamber from specimen chamber.

Keywords

ANSYS Fluent, Electron microscopy, Environmental scanning electron microscope, Dr. Danilatos, Monte Carlo

Released

11.09.2017

Publisher

Brno University of Technology

Location

Brno

ISBN

978-80-214-5529-0

Book

Advanced Batteries Accumulators and Fuel Cells - 18th ABAF

Edition

18

Edition number

1

Pages from

161

Pages to

163

Pages count

3

BibTex


@inproceedings{BUT140295,
  author="Pavla {Šabacká} and Jiří {Maxa} and Michal {Bílek} and Petr {Vyroubal}",
  title="Impact of the shape of the differentially pumped chamber on critical flow
character",
  annote="The article deals with the impact of the shape of the differential pumped
chamber of the Environmental electron microscope on resultant value of
average Normalized density number on the path of the primary electron beam
which has directly proportional influence on the dispersion of this beam and
thereby influence on sharpness resulting image. Analysis were made using
finite volume method in Ansys Fluent system with the respect to critical flow
created behind the aperture which separates differential pumped chamber
from specimen chamber.",
  address="Brno University of Technology",
  booktitle="Advanced Batteries Accumulators and Fuel Cells - 18th ABAF",
  chapter="140295",
  edition="18",
  howpublished="electronic, physical medium",
  institution="Brno University of Technology",
  year="2017",
  month="september",
  pages="161--163",
  publisher="Brno University of Technology",
  type="conference paper"
}