Publication detail

INFLUENCE OF SCANNING RATE ON QUALITY OF AFM IMAGE: STUDY OF SURFACE STATISTICAL METRICS

SOBOLA, D. TALU, S. SOLAYMANI, S. GRMELA, L.

Original Title

INFLUENCE OF SCANNING RATE ON QUALITY OF AFM IMAGE: STUDY OF SURFACE STATISTICAL METRICS

Czech Title

VLIV SNÍMACÍCH ÚDAJŮ NA KVALITU AFM OBRAZŮ: STUDIUM STATISTICKÝCH METRICK POVRCHU

English Title

INFLUENCE OF SCANNING RATE ON QUALITY OF AFM IMAGE: STUDY OF SURFACE STATISTICAL METRICS

Type

journal article

Language

en

Original Abstract

The purpose of this work is to study the dependence of AFM-data reliability on scanning rate. The three-dimensional (3-D) surface topography of the samples with different micro-motifs is investigated. The analysis of surface metrics for estimation of artifacts from inappropriate scanning rate is presented. Fractal analysis was done by cube counting method and evaluation of statistical metrics was carrying out on the basis of AFM-data. Combination of quantitate parameters is also presented in graphs for every measurement. The results indicate that the sensitivity to scanning rate growths with fractal dimension of the sample. This approach allows describing the distortion of the images against scanning rate and could be applied for dependences on the other measurement parameters. The paper explains the relevance and comparison of fractal and statistical surface parameters for characterization of data distortion caused by inappropriate choice of scanning rate.

Czech abstract

Vyšetřuje se trojrozměrná (3-D) povrchová topografie vzorků s různými mikro-motivy. Je prezentována analýza povrchových metrik pro odhad artefaktů. Fraktální analýza byla provedena metodou počítání kubů a vyhodnocení statistických metrik provádělo na základě údajů AFM. Kombinace parametrů kvantitativních hodnot je také uvedena v grafech pro každé měření. Tento přístup umožňuje popisovat zkreslení obrazu a lze jej použít pro závislosti na ostatních měřicích parametrech.

English abstract

The purpose of this work is to study the dependence of AFM-data reliability on scanning rate. The three-dimensional (3-D) surface topography of the samples with different micro-motifs is investigated. The analysis of surface metrics for estimation of artifacts from inappropriate scanning rate is presented. Fractal analysis was done by cube counting method and evaluation of statistical metrics was carrying out on the basis of AFM-data. Combination of quantitate parameters is also presented in graphs for every measurement. The results indicate that the sensitivity to scanning rate growths with fractal dimension of the sample. This approach allows describing the distortion of the images against scanning rate and could be applied for dependences on the other measurement parameters. The paper explains the relevance and comparison of fractal and statistical surface parameters for characterization of data distortion caused by inappropriate choice of scanning rate.

Keywords

atomic force microscopy; scanning rate; fractal analysis; surface micro-morphology

Released

14.09.2017

Publisher

Wiley

Pages from

1

Pages to

11

Pages count

11

URL

BibTex


@article{BUT138861,
  author="Dinara {Sobola} and Stefan {Talu} and Shahram {Solaymani} and Lubomír {Grmela}",
  title="INFLUENCE OF SCANNING RATE ON QUALITY OF AFM IMAGE: STUDY OF SURFACE STATISTICAL METRICS",
  annote="The purpose of this work is to study the dependence of AFM-data reliability on scanning rate. The three-dimensional (3-D) surface topography of the samples with different micro-motifs is investigated. The analysis of surface metrics for estimation of artifacts from inappropriate scanning rate is presented. Fractal analysis was done by cube counting method and evaluation of statistical metrics was carrying out on the basis of AFM-data. Combination of quantitate parameters is also presented in graphs for every measurement. The results indicate that the sensitivity to scanning rate growths with fractal dimension of the sample. This approach allows describing the distortion of the images against scanning rate and could be applied for dependences on the other measurement parameters. The paper explains the relevance and comparison of fractal and statistical surface parameters for characterization of data distortion caused by inappropriate choice of scanning rate.",
  address="Wiley",
  chapter="138861",
  doi="10.1002/jemt.22945",
  howpublished="online",
  institution="Wiley",
  number="7",
  volume="80",
  year="2017",
  month="september",
  pages="1--11",
  publisher="Wiley",
  type="journal article"
}