Publication detail

The Nanolithography Toolbox

BALRAM, KC WESTLY,DA DAVANCO,M GRUTTER,KE LI,Q MICHELS,T RAY,CH YU,LY KASICA,RJ WALLIN,CB GILBERT,IJ BRYCE,BA SIMELGOR,G TOPOLANCIK,J LOBONTIU,N LIU,YX NEUZIL,P SVATOS,V DILL,KA BERTRAND,NA METZLER,MG LOPEZ,G CZAPLEWSKI,DA OCOLA,L SRINIVASAN,KA STAVIS,SM AKSYUK,VA LIDDLE, JA KRYLOV,S ILIC, BR.

Original Title

The Nanolithography Toolbox

Type

journal article in Web of Science

Language

English

Original Abstract

This article introduces in archival form the Nanolithography Toolbox, a platform-independent software package for scripted lithography pattern layout generation. The Center for Nanoscale Science and Technology (CNST) at the National Institute of Standards and Technology (NIST) developed the Nanolithography Toolbox to help users of the CNST NanoFab design devices with complex curves and aggressive critical dimensions. Using parameterized shapes as building blocks, the Nanolithography Toolbox allows users to rapidly design and layout nanoscale devices of arbitrary complexity through scripting and programming. The Toolbox offers many parameterized shapes, including structure libraries for micro-and nanoelectromechanical systems (MEMS and NEMS) and nanophotonic devices.

Keywords

CAD; lithography; nanofabrication; nanofluidic; nanophotonic; nanoplasmonic; nanoscale curved features; nanoscale design; nanoscale devices

Authors

BALRAM, KC; WESTLY,DA; DAVANCO,M; GRUTTER,KE; LI,Q; MICHELS,T; RAY,CH; YU,LY; KASICA,RJ; WALLIN,CB; GILBERT,IJ; BRYCE,BA; SIMELGOR,G; TOPOLANCIK,J; LOBONTIU,N; LIU,YX; NEUZIL,P; SVATOS,V; DILL,KA; BERTRAND,NA; METZLER,MG; LOPEZ,G; CZAPLEWSKI,DA; OCOLA,L; SRINIVASAN,KA; STAVIS,SM; AKSYUK,VA; LIDDLE, JA; KRYLOV,S; ILIC, BR.

Released

19. 10. 2016

Publisher

US GOVERNMENT PRINTING OFFICE

Location

WASHINGTON, DC 20402-9325 USA

ISBN

1044-677X

Periodical

JOURNAL OF RESEARCH OF THE NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY

Year of study

121

Number

1

State

United States of America

Pages from

464

Pages to

475

Pages count

11

URL

https://apps.webofknowledge.com/full_record.do?product=WOS&search_mode=GeneralSearch&qid=4&SID=W2hKFfHmgNk3xhiPDY1&page=1&doc=1

BibTex

@article{BUT130237,
  author="BALRAM, KC and WESTLY,DA and DAVANCO,M and GRUTTER,KE and LI,Q and MICHELS,T and RAY,CH and YU,LY and KASICA,RJ and WALLIN,CB and GILBERT,IJ and BRYCE,BA and SIMELGOR,G and TOPOLANCIK,J and LOBONTIU,N and LIU,YX and NEUZIL,P and SVATOS,V and DILL,KA and BERTRAND,NA and METZLER,MG and LOPEZ,G and CZAPLEWSKI,DA and OCOLA,L and SRINIVASAN,KA and STAVIS,SM and AKSYUK,VA and LIDDLE, JA and KRYLOV,S and ILIC, BR.",
  title="The Nanolithography Toolbox",
  journal="JOURNAL OF RESEARCH OF THE NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY",
  year="2016",
  volume="121",
  number="1",
  pages="464--475",
  doi="10.6028/jres.121.024",
  issn="1044-677X",
  url="https://apps.webofknowledge.com/full_record.do?product=WOS&search_mode=GeneralSearch&qid=4&SID=W2hKFfHmgNk3xhiPDY1&page=1&doc=1"
}