Publication detail

Comparison of Results obtained using Different Turbulence Models in Analysis Differentially Pumped Chamber

BÍLEK, M. MAXA, J. HLAVATÁ, P.

Original Title

Comparison of Results obtained using Different Turbulence Models in Analysis Differentially Pumped Chamber

English Title

Comparison of Results obtained using Different Turbulence Models in Analysis Differentially Pumped Chamber

Type

conference paper

Language

en

Original Abstract

The goal of this thesis is the analysis of a gas flow running through the drain channels within the apertures of differentially pumped chamber of the Environmental Scanning Electron Microscope (ESEM).In the thesis contains a verification of current simulation results of gas flow within the differentially pumped chamber published by D. Danilatos using Monte Carlo method in comparison with simulation results achieved by using simulation program ANSYS Fluent, which uses the mechanism of continuum for its calculations

English abstract

The goal of this thesis is the analysis of a gas flow running through the drain channels within the apertures of differentially pumped chamber of the Environmental Scanning Electron Microscope (ESEM).In the thesis contains a verification of current simulation results of gas flow within the differentially pumped chamber published by D. Danilatos using Monte Carlo method in comparison with simulation results achieved by using simulation program ANSYS Fluent, which uses the mechanism of continuum for its calculations

Keywords

Danilatos, ANSYS, ESEM,

Released

07.12.2016

ISBN

978-80-214-5109-4

Book

ECS Transactions

Pages from

259

Pages to

266

Pages count

8

BibTex


@inproceedings{BUT129481,
  author="Michal {Bílek} and Jiří {Maxa} and Pavla {Šabacká}",
  title="Comparison of Results obtained using Different Turbulence Models in Analysis Differentially Pumped Chamber",
  annote="The goal of this thesis is the analysis of a gas flow running through the drain channels within the apertures of differentially pumped chamber of the Environmental Scanning Electron Microscope (ESEM).In the thesis contains a verification of current simulation results of gas flow within the differentially pumped chamber published by D. Danilatos using Monte Carlo method in comparison with simulation results achieved by using simulation program ANSYS Fluent, which uses the mechanism of continuum for its calculations",
  booktitle="ECS Transactions",
  chapter="129481",
  doi="10.1149/07401.0259ecst",
  howpublished="online",
  year="2016",
  month="december",
  pages="259--266",
  type="conference paper"
}