Publication detail

Comparison of Results obtained using Different Turbulence Models in Analysis Differentially Pumped Chamber

BÍLEK, M. MAXA, J. HLAVATÁ, P.

Original Title

Comparison of Results obtained using Different Turbulence Models in Analysis Differentially Pumped Chamber

Type

conference paper

Language

English

Original Abstract

The goal of this thesis is the analysis of a gas flow running through the drain channels within the apertures of differentially pumped chamber of the Environmental Scanning Electron Microscope (ESEM).In the thesis contains a verification of current simulation results of gas flow within the differentially pumped chamber published by D. Danilatos using Monte Carlo method in comparison with simulation results achieved by using simulation program ANSYS Fluent, which uses the mechanism of continuum for its calculations

Keywords

Danilatos, ANSYS, ESEM,

Authors

BÍLEK, M.; MAXA, J.; HLAVATÁ, P.

Released

7. 12. 2016

Publisher

The Electrochemical Society

ISBN

978-80-214-5109-4

Book

ECS Transactions

ISBN

1938-5862

Periodical

ECS Transactions

Year of study

74

Number

1

State

United States of America

Pages from

259

Pages to

266

Pages count

8

URL

https://iopscience.iop.org/article/10.1149/07401.0259ecst/pdf

BibTex

@inproceedings{BUT129481,
  author="Michal {Bílek} and Jiří {Maxa} and Pavla {Šabacká}",
  title="Comparison of Results obtained using Different Turbulence Models in Analysis Differentially Pumped Chamber",
  booktitle="ECS Transactions",
  year="2016",
  journal="ECS Transactions",
  volume="74",
  number="1",
  pages="259--266",
  publisher="The Electrochemical Society",
  doi="10.1149/07401.0259ecst",
  isbn="978-80-214-5109-4",
  issn="1938-5862",
  url="https://iopscience.iop.org/article/10.1149/07401.0259ecst/pdf"
}