Publication detail

Comparisons Using Methods of Continuum Mechanics and Monte Carlo at Differentially Pumped Chamber.

MAXA, J. BÍLEK, M. HLAVATÁ, P. VYROUBAL, P. LEPLTOVÁ, K.

Original Title

Comparisons Using Methods of Continuum Mechanics and Monte Carlo at Differentially Pumped Chamber.

English Title

Comparisons Using Methods of Continuum Mechanics and Monte Carlo at Differentially Pumped Chamber.

Type

journal article

Language

en

Original Abstract

The article deals with the analysis of gas flows in pumped canals in differential pumped chamber of the Environmental Scanning Electron Microscope (ESEM). The article compares and verifies existing results of differentially pumped chamber flow simulation from ANSYS Fluent system, which uses the mechanics of continuum, with the ones published by D. Danilatos using the Monte Carlo method.

English abstract

The article deals with the analysis of gas flows in pumped canals in differential pumped chamber of the Environmental Scanning Electron Microscope (ESEM). The article compares and verifies existing results of differentially pumped chamber flow simulation from ANSYS Fluent system, which uses the mechanics of continuum, with the ones published by D. Danilatos using the Monte Carlo method.

Keywords

ANSYS Fluent, differentially pumped chamber, EREM, Monte Carlo.

Released

04.10.2016

Publisher

AiMt University of Defence

Location

Brno

Pages from

143

Pages to

150

Pages count

8

BibTex


@article{BUT128740,
  author="Jiří {Maxa} and Michal {Bílek} and Pavla {Šabacká} and Petr {Vyroubal} and Kristýna {Lepltová}",
  title="Comparisons Using Methods of Continuum Mechanics and Monte Carlo at Differentially Pumped Chamber.",
  annote="The article deals with the analysis of gas flows in pumped canals in differential pumped chamber of the Environmental Scanning Electron Microscope (ESEM). The article compares and verifies existing results of differentially pumped chamber flow simulation from ANSYS Fluent system, which uses the mechanics of continuum, with the ones published by D. Danilatos using the Monte Carlo method.",
  address="AiMt University of Defence",
  chapter="128740",
  doi="10.3849/aimt.01120",
  howpublished="print",
  institution="AiMt University of Defence",
  number="2",
  volume="11",
  year="2016",
  month="october",
  pages="143--150",
  publisher="AiMt University of Defence",
  type="journal article"
}