Publication detail

Chemoresistive micromachined gas sensors based on functionalized metal oxide nanowires: performance and reliability

CHMELA, O. VALLEJOS VARGAS, S. HUBÁLEK, J.

Original Title

Chemoresistive micromachined gas sensors based on functionalized metal oxide nanowires: performance and reliability

Type

journal article in Web of Science

Language

English

Original Abstract

Chemoresistive micromachined gas sensors with bottom-electrode configuration and based on Pt-unctionalized tungsten oxide nanowires are fabricated. The performance and reliability of three types of devices with different electrode gap (5, 10 and 15 m) are analyzed in dry and humid ambient and towards various analytes (H2, NO2, EtOH, and CO). Results demonstrate an improved response, sensitivity, and stability with better dynamic of the response for the sensors with the electrode gap of 5 m, showing up to 7-fold higher responses and 32-fold faster responses towards hydrogen compared to the sensors with the electrode gap of 10 or 15 m. These results are connected with the increment of the density of nanowire junctions across the electrodes with 5 m gap; separation that corresponds to half of the length of the wires used in this work.

Keywords

Micromachined gas sensor, nanowires, electrodes, optimization

Authors

CHMELA, O.; VALLEJOS VARGAS, S.; HUBÁLEK, J.

Released

1. 11. 2016

Publisher

ELSEVIER

ISBN

0925-4005

Periodical

Sensors and Actuators B: Chemical

Number

235

State

Swiss Confederation

Pages from

525

Pages to

534

Pages count

14

URL

http://dx.doi.org/10.1016/j.snb.2016.05.102

BibTex

@article{BUT127610,
  author="Ondřej {Chmela} and Stella {Vallejos Vargas} and Jaromír {Hubálek}",
  title="Chemoresistive micromachined gas sensors based on functionalized metal oxide nanowires: performance and reliability",
  journal="Sensors and Actuators B: Chemical",
  year="2016",
  number="235",
  pages="525--534",
  doi="10.1016/j.snb.2016.05.102",
  issn="0925-4005",
  url="http://dx.doi.org/10.1016/j.snb.2016.05.102"
}