Publication detail

Temperature and Sensitivity Analysis on MEMS Vibration Sensors with Different Principles of Operation

KLUSÁČEK, S. HAVRÁNEK, Z. HASÍK, S. FIALKA, J. BENEŠ, P.

Original Title

Temperature and Sensitivity Analysis on MEMS Vibration Sensors with Different Principles of Operation

English Title

Temperature and Sensitivity Analysis on MEMS Vibration Sensors with Different Principles of Operation

Type

conference paper

Language

en

Original Abstract

This article describes the experimental research on qualitative parameter validation of MEMS-based vibration sensors. The aim of the paper is to compare three MEMS vibration sensors with different principles of operation; the investigated samples represent major principles used in currently available MEMS accelerometers, namely the capacitive (STMicroelectronics LIS3L06AL), thermal (MEMSIC MXA6500M), and piezoresistive (Panasonic AGS61331) approaches. The actual comparison of the examined objects was performed using primary and secondary methods for the calibration of vibration sensors. In the first experiment, we measured the sensitivity and frequency characteristics within the operating range of the accelerometers, applying the primary methods to compare the investigated MEMS objects. At the following stage, the results yielded from the monitoring of temperature effects and their analysis based on the secondary calibration methods were utilized to verify the sensitivity and temperature dependences of the MEMS accelerometers. Within the paper, the measured characteristics are compared to the related catalog datasheets, and the possibilities of suppressing the temperature effects are discussed to finalize the overall presentation of the problem.

English abstract

This article describes the experimental research on qualitative parameter validation of MEMS-based vibration sensors. The aim of the paper is to compare three MEMS vibration sensors with different principles of operation; the investigated samples represent major principles used in currently available MEMS accelerometers, namely the capacitive (STMicroelectronics LIS3L06AL), thermal (MEMSIC MXA6500M), and piezoresistive (Panasonic AGS61331) approaches. The actual comparison of the examined objects was performed using primary and secondary methods for the calibration of vibration sensors. In the first experiment, we measured the sensitivity and frequency characteristics within the operating range of the accelerometers, applying the primary methods to compare the investigated MEMS objects. At the following stage, the results yielded from the monitoring of temperature effects and their analysis based on the secondary calibration methods were utilized to verify the sensitivity and temperature dependences of the MEMS accelerometers. Within the paper, the measured characteristics are compared to the related catalog datasheets, and the possibilities of suppressing the temperature effects are discussed to finalize the overall presentation of the problem.

Keywords

MEMS, vibration sensors, calibration, temperature analysis, sensitivity analysis

RIV year

2015

Released

12.07.2015

Publisher

International Institute of Acoustic and Vibration

Location

Florencie, Itálie

ISBN

978-88-88942-48-3

Book

Proceedings of the 22nd International Congress on Sound and Vibration

Pages from

1

Pages to

8

Pages count

8

URL

Documents

BibTex


@inproceedings{BUT115788,
  author="Stanislav {Klusáček} and Zdeněk {Havránek} and Stanislav {Hasík} and Jiří {Fialka} and Petr {Beneš}",
  title="Temperature and Sensitivity Analysis on MEMS Vibration Sensors with Different Principles of Operation
",
  annote="This article describes the experimental research on qualitative parameter validation of MEMS-based vibration sensors. The aim of the paper is to compare three MEMS vibration sensors with different principles of operation; the investigated samples represent major principles used in currently available MEMS accelerometers, namely the capacitive (STMicroelectronics LIS3L06AL), thermal (MEMSIC MXA6500M), and piezoresistive (Panasonic AGS61331) approaches. The actual comparison of the examined objects was performed using primary and secondary methods for the calibration of vibration sensors. In the first experiment, we measured the sensitivity and frequency characteristics within the operating range of the accelerometers, applying the primary methods to compare the investigated MEMS objects. At the following stage, the results yielded from the monitoring of temperature effects and their analysis based on the secondary calibration methods were utilized to verify the sensitivity and temperature dependences of the MEMS accelerometers. Within the paper, the measured characteristics are compared to the related catalog datasheets, and the possibilities of suppressing the temperature effects are discussed to finalize the overall presentation of the problem.",
  address="International Institute of Acoustic and Vibration",
  booktitle="Proceedings of the 22nd International Congress on Sound and Vibration",
  chapter="115788",
  howpublished="electronic, physical medium",
  institution="International Institute of Acoustic and Vibration",
  year="2015",
  month="july",
  pages="1--8",
  publisher="International Institute of Acoustic and Vibration",
  type="conference paper"
}