Publication detail

Prvková analýza nečistoty z kontaktu

WASSERBAUER, J. ŠOUKAL, F.

Original Title

Prvková analýza nečistoty z kontaktu

English Title

Elemental analysis of contaminants from contact.

Type

report

Language

Czech

Original Abstract

Prvková analýza byla provedena na rastrovacím elektronovém mikroskopu ZEISS EVO LS 10 s energiově dispersním analyzátorem OXFORD X-Max 80 mm2.

English abstract

Elemental analysis was performed on a scanning electron microscope Zeiss EVO LS 10 with an energy dispersive analyzer OXFORD X-Max 80 mm2.

Keywords

Kontaminace, SEM, EDS.

Key words in English

Contaminants, SEM, EDS.

Authors

WASSERBAUER, J.; ŠOUKAL, F.

Released

22. 7. 2013

Pages from

1

Pages to

15

Pages count

15

BibTex

@techreport{BUT106328,
  author="Jaromír {Wasserbauer} and František {Šoukal}",
  title="Prvková analýza nečistoty z kontaktu",
  year="2013",
  pages="1--15"
}