Publication detail

Early Access Tools - Integration of TCAD Tools and Fabrication

RECMAN, M.

Original Title

Early Access Tools - Integration of TCAD Tools and Fabrication

Type

conference paper

Language

English

Original Abstract

To develop a powerful TCAD( Technology CAD ) package the two main problems are to be solved. The first one is to extract device model parameter values from front-end technological parameters. The second problem to be solved is to calibrate TCAD software to specific tools and process modules to give a fast, accurate and reliable method of evaluating and optimizing process conditions without the need to run numerous test wafers. At present the exploitation of the TCAD tools to solve these problems is under study, and it seems to be just the beginning of a path that provides a new realm of highly accurate device performance modeling. The approaches to integrate process, device and circuit simulation TCAD tools are reviewed and examples to solve these problems by leading TCAD vendors are presented.

Keywords

process simulation, device simulation, circuit simulation, computer-aided design, semiconductor devices modeling

Authors

RECMAN, M.

RIV year

2003

Released

1. 1. 2003

Publisher

Novotný-Brno

Location

Brno

ISBN

80-214-2452-4

Book

Electronic Devices and Systems 2003 - Proceedings

Pages from

270

Pages to

275

Pages count

6

BibTex

@inproceedings{BUT9408,
  author="Milan {Recman}",
  title="Early Access Tools - Integration of TCAD Tools and Fabrication",
  booktitle="Electronic Devices and Systems 2003 - Proceedings",
  year="2003",
  pages="6",
  publisher="Novotný-Brno",
  address="Brno",
  isbn="80-214-2452-4"
}