Publication detail

3D Construction View of Differential Pumping Chamber with Detector Board of Environmental Scanning Electron Microscope

NEDĚLA, V.

Original Title

3D Construction View of Differential Pumping Chamber with Detector Board of Environmental Scanning Electron Microscope

Type

conference paper

Language

English

Original Abstract

This paper deals with construction of the differential pumping chamber with a detector board for adaptation of the scanning electron microscope (SEM) to the environmental scanning electron microscope (ESEM). ESEM allows work at higher pressure in some parts of the microscope. It focuses especially on the 3D construction view of the differential pumping chamber together with the detector board of the differential pumping chamber and it comments reasons of necessity of the assembly of these parts into the environmental scanning electron microscope.

Keywords

Chamber,ESEM,detector board,differential

Authors

NEDĚLA, V.

Released

16. 10. 2003

Location

Plzeň

ISBN

80-7082-993-1

Book

Elektrotechnika a informatika 2003

Edition number

1

Pages from

96

Pages to

99

Pages count

4

BibTex

@inproceedings{BUT8969,
  author="Vilém {Neděla}",
  title="3D Construction View of Differential Pumping Chamber with Detector Board of Environmental Scanning Electron Microscope",
  booktitle="Elektrotechnika a informatika 2003",
  year="2003",
  number="1",
  pages="4",
  address="Plzeň",
  isbn="80-7082-993-1"
}