Publication detail

Ultrasonics spectroscopy of silicon single crystal

SEDLÁK, P. TOFEL, P. SEDLÁKOVÁ, V. MAJZNER, J. ŠIKULA, J. HASSE, L.

Original Title

Ultrasonics spectroscopy of silicon single crystal

English Title

Ultrasonics spectroscopy of silicon single crystal

Type

journal article - other

Language

en

Original Abstract

Specimens of Si single crystals with different crystal orientation [100] and [110] were studied by the Electro-Ultrasonic Spectroscopy (EUS) and Resonant Ultrasonic Spectroscopy (RUS). A silicon single crystal is an anisotropic crystal, so its properties are different in different directions in the material relative to the crystal orientation

English abstract

Specimens of Si single crystals with different crystal orientation [100] and [110] were studied by the Electro-Ultrasonic Spectroscopy (EUS) and Resonant Ultrasonic Spectroscopy (RUS). A silicon single crystal is an anisotropic crystal, so its properties are different in different directions in the material relative to the crystal orientation

Keywords

non-destructive testing, silicon single crystal, electro-ultrasonic spectroscopy, resonant ultrasonic spectroscopy

RIV year

2011

Released

12.12.2011

Publisher

Versita

Location

Warsaw, Poland

Pages from

621

Pages to

630

Pages count

10

BibTex


@article{BUT75545,
  author="Petr {Sedlák} and Pavel {Tofel} and Vlasta {Sedláková} and Jiří {Majzner} and Josef {Šikula} and Lech {Hasse}",
  title="Ultrasonics spectroscopy of silicon single crystal",
  annote="Specimens of Si single crystals with different crystal orientation [100] and [110] were studied by the Electro-Ultrasonic Spectroscopy (EUS) and Resonant Ultrasonic Spectroscopy (RUS). A silicon single crystal is an anisotropic crystal, so its properties are different in different directions in the material relative to the crystal orientation",
  address="Versita",
  chapter="75545",
  institution="Versita",
  number="4",
  volume="18",
  year="2011",
  month="december",
  pages="621--630",
  publisher="Versita",
  type="journal article - other"
}