Publication detail

Allan variance analysis on MEMS tilt sensors with different principles of operation

HAVRÁNEK, Z. KLUSÁČEK, S. BENEŠ, P. VÁGNER, M.

Original Title

Allan variance analysis on MEMS tilt sensors with different principles of operation

Czech Title

Analýza MEMS snímačů s různým principem pomocí Allanovy odchylky

English Title

Allan variance analysis on MEMS tilt sensors with different principles of operation

Type

conference paper

Language

en

Original Abstract

Tilt sensing is an important part in absolute position and orientation measurement, e.g. inertial navigation units and tilt detectors. In this paper, the direct comparison of three MEMS tilt sensors with different principle of operation has been carried out and evaluated using Allan Variance (AV) method. Selected samples represent major principles used in MEMS accelerometers on the market - capacitive Analog Devices ADXL203, thermal MEMSIC MXA6500M and piezoresistive Panasonic AGS61231. All devices have similar measurement range and acceleration sensitivity. The results of AV analysis show similar behavior and curve shape in capacitive principle, with the lowest acceleration random walk observed, and in thermal principle, with six times higher bias instability in compare with capacitive principle. The piezoresistive principle has lower velocity random walk, but it is very sensitive to temperature variations, seen in long cluster times.

Czech abstract

Měření náklonu je důležitou součástí při měření absolutní polohy a orientace v prostoru, např. pro inerciální navigaci a detektory náklonu. V tomto článku jsou přímo porovnány tři typy MEMS snímačů náklonu s rozdílným principem pomocí metody výpočtu Allanovy odchylky (AV). Vybrané vzorky snímačů reprezentují hlavní používané principy v MEMS akcelerometrech na trhu - kapacitní Analog Devices ADXL203, tepelný MEMSIC MXA6500M and piezorezistivní Panasonic AGS61231. Zařízení mají velmi podobné měřicí rozsahy a citlivosti při měření zrychlení. Výsledky AV analýzy ukazují podobné chování a tvar křivky pro kapacitní a tepelný princip, kde u kapacitního je nejnižší hodnota ARW, zatímco u tepelného je vyšší hodnota BI oproti kapacitnímu pricipu (6x). Piezorezistivní princip vykazuje nejnižší VRW, ale je velmi citlivý na změny okolní teploty, což je patrné v delších časových oknech.

English abstract

Tilt sensing is an important part in absolute position and orientation measurement, e.g. inertial navigation units and tilt detectors. In this paper, the direct comparison of three MEMS tilt sensors with different principle of operation has been carried out and evaluated using Allan Variance (AV) method. Selected samples represent major principles used in MEMS accelerometers on the market - capacitive Analog Devices ADXL203, thermal MEMSIC MXA6500M and piezoresistive Panasonic AGS61231. All devices have similar measurement range and acceleration sensitivity. The results of AV analysis show similar behavior and curve shape in capacitive principle, with the lowest acceleration random walk observed, and in thermal principle, with six times higher bias instability in compare with capacitive principle. The piezoresistive principle has lower velocity random walk, but it is very sensitive to temperature variations, seen in long cluster times.

Keywords

MEMS accelerometer, tilt sensing, Allan variance, thermal accelerometer

RIV year

2011

Released

28.10.2011

Publisher

IEEE

Location

Limerick, Ireland

ISBN

978-1-4244-9288-6

Book

2011 IEEE SENSORS Proceedings

Edition number

1

Pages from

1685

Pages to

1688

Pages count

4

BibTex


@inproceedings{BUT74701,
  author="Zdeněk {Havránek} and Stanislav {Klusáček} and Petr {Beneš} and Martin {Vágner}",
  title="Allan variance analysis on MEMS tilt sensors with different principles of operation",
  annote="Tilt sensing is an important part in absolute position and orientation measurement, e.g. inertial navigation units and tilt detectors. In this paper, the direct comparison of three MEMS tilt sensors with different principle of operation has been carried out and evaluated using Allan Variance (AV) method. Selected samples represent major principles used in MEMS accelerometers on the market - capacitive Analog Devices ADXL203, thermal MEMSIC MXA6500M and piezoresistive Panasonic AGS61231. All devices have similar measurement range and acceleration sensitivity. The results of AV analysis show similar behavior and curve shape in capacitive principle, with the lowest acceleration random walk observed, and in thermal principle, with six times higher bias instability in compare with capacitive principle. The piezoresistive principle has lower velocity random walk, but it is very sensitive to temperature variations, seen in long cluster times.",
  address="IEEE",
  booktitle="2011 IEEE SENSORS Proceedings",
  chapter="74701",
  howpublished="electronic, physical medium",
  institution="IEEE",
  year="2011",
  month="october",
  pages="1685--1688",
  publisher="IEEE",
  type="conference paper"
}