Publication detail

Deposition of Carbon Nanotubes in Microwave Torch at Atmospheric Pressure

PEKÁREK, J. VRBA, R. FICEK, R.

Original Title

Deposition of Carbon Nanotubes in Microwave Torch at Atmospheric Pressure

English Title

Deposition of Carbon Nanotubes in Microwave Torch at Atmospheric Pressure

Type

conference paper

Language

en

Original Abstract

Carbon nanotubes are new material with unique electrical and mechanical properties. Most of these properties of carbon nanotubes depend on their diameters and chiralities. The depositions were carried out on silicon single crystal (Si) wafer of the orientation <100> doped by phosphorus. Substrates were coated with a thin iron catalytic layer which was vacuum-evaporated to a thickness in the range of 10 nm into the size of 5x5 mm2. Using methane as carbon resource, hydrogen as carrier, carbon nanotubes were synthesized by microwave plasma enhanced chemical vapor deposition (PECVD) at atmospheric pressure. Samples were analyzed by scanning electron microscopy (SEM).

English abstract

Carbon nanotubes are new material with unique electrical and mechanical properties. Most of these properties of carbon nanotubes depend on their diameters and chiralities. The depositions were carried out on silicon single crystal (Si) wafer of the orientation <100> doped by phosphorus. Substrates were coated with a thin iron catalytic layer which was vacuum-evaporated to a thickness in the range of 10 nm into the size of 5x5 mm2. Using methane as carbon resource, hydrogen as carrier, carbon nanotubes were synthesized by microwave plasma enhanced chemical vapor deposition (PECVD) at atmospheric pressure. Samples were analyzed by scanning electron microscopy (SEM).

Keywords

carbon nanotubes, plasma enhanced chemical vapor deposition, electron microscopy

RIV year

2008

Released

10.09.2008

Publisher

Ing. Zdeněk Novotný, CSc.

Location

Brno

ISBN

978-80-214-3717-3

Book

Electronic Devices and Systems EDS'08 IMAPS CS International Conference 2008

Edition number

2

Pages from

566

Pages to

569

Pages count

4

BibTex


@inproceedings{BUT31418,
  author="Jan {Pekárek} and Radimír {Vrba} and Richard {Ficek}",
  title="Deposition of Carbon Nanotubes in Microwave Torch at Atmospheric Pressure",
  annote="Carbon nanotubes are new material with unique electrical and mechanical properties. Most of these properties of carbon nanotubes depend on their diameters and chiralities. The depositions were carried out on silicon single crystal (Si) wafer of the orientation <100> doped by phosphorus. Substrates were coated with a thin iron catalytic layer which was vacuum-evaporated to a thickness in the range of 10 nm into the size of 5x5 mm2. Using methane as carbon resource, hydrogen as carrier, carbon nanotubes were synthesized by microwave plasma enhanced chemical vapor deposition (PECVD) at atmospheric pressure. Samples were analyzed by scanning electron microscopy (SEM).",
  address="Ing. Zdeněk Novotný, CSc.",
  booktitle="Electronic Devices and Systems EDS'08 IMAPS CS International Conference 2008",
  chapter="31418",
  howpublished="print",
  institution="Ing. Zdeněk Novotný, CSc.",
  year="2008",
  month="september",
  pages="566--569",
  publisher="Ing. Zdeněk Novotný, CSc.",
  type="conference paper"
}