Publication detail

Skenovací optická mikroskopie v blízkém poli jako nástroj lokální charakterizace elektronických součástek

Original Title

Skenovací optická mikroskopie v blízkém poli jako nástroj lokální charakterizace elektronických součástek

Czech Title

Skenovací optická mikroskopie v blízkém poli jako nástroj lokální charakterizace elektronických součástek

Language

cs

Original Abstract

The development of micro and nanoelectronics and nanophotonics needs novel characteri-zation techniques to ensure higher quality of designed devices. The paper describes a use of Scanning Near-field Optical Microscopy (SNOM) in dimensional control and in local investigation of diverse physical parameters. As example of its potential, the correlation between object topography and reflection measurement of tantalum condenser is shown.

Czech abstract

The development of micro and nanoelectronics and nanophotonics needs novel characteri-zation techniques to ensure higher quality of designed devices. The paper describes a use of Scanning Near-field Optical Microscopy (SNOM) in dimensional control and in local investigation of diverse physical parameters. As example of its potential, the correlation between object topography and reflection measurement of tantalum condenser is shown.

BibTex


@inproceedings{BUT29820,
  author="Pavel {Müller}",
  title="Skenovací optická mikroskopie v blízkém poli jako nástroj lokální charakterizace elektronických součástek",
  annote="The development of micro and nanoelectronics and nanophotonics needs novel characteri-zation techniques to ensure higher quality of designed devices. The paper describes a use of Scanning Near-field Optical Microscopy (SNOM) in dimensional control and in local investigation of diverse physical parameters. As example of its potential, the correlation between object topography and reflection measurement of tantalum condenser is shown.",
  address="Novpress, s.r.o.",
  booktitle="Proceedings of the 16th conference STUDENT EEICT 2010, vol. 2",
  chapter="29820",
  howpublished="print",
  institution="Novpress, s.r.o.",
  year="2010",
  month="april",
  pages="195--197",
  publisher="Novpress, s.r.o.",
  type="conference paper"
}