Publication detail

Methods of measurement of capacitive pressure sensors

BEČVÁŘ, D., HUBÁLEK, J., VRBA, R., MUSIL, V.

Original Title

Methods of measurement of capacitive pressure sensors

Type

conference paper

Language

English

Original Abstract

Novel methods of pressure measurement of capacitive sensors are presented. All of them are shown as very suitable for on-chip realisations. The very small capacity measurement, high resolution and auto-calibrated techniques are described in this paper.

Key words in English

measurement methods, capacitive sensor, pressure sensor, integrated circuit

Authors

BEČVÁŘ, D., HUBÁLEK, J., VRBA, R., MUSIL, V.

RIV year

2001

Released

12. 9. 2001

Publisher

Ing. Zdeněk Novotný, CSc.

Location

Brno

ISBN

80-214-1960-1

Book

Electronic devices and systems 01 - Proceedings

Edition number

1

Pages from

242

Pages to

247

Pages count

6

BibTex

@inproceedings{BUT2847,
  author="Daniel {Bečvář} and Jaromír {Hubálek} and Radimír {Vrba} and Vladislav {Musil}",
  title="Methods of measurement of capacitive pressure sensors",
  booktitle="Electronic devices and systems 01 - Proceedings",
  year="2001",
  number="1",
  pages="6",
  publisher="Ing. Zdeněk Novotný, CSc.",
  address="Brno",
  isbn="80-214-1960-1"
}