Publication detail

Carbon nanotubes in pressure sensors

FICEK, R. VRBA, R. JAŠEK, O. ELIÁŠ, M. ZAJÍČKOVÁ, L.

Original Title

Carbon nanotubes in pressure sensors

English Title

Carbon nanotubes in pressure sensors

Type

conference paper

Language

en

Original Abstract

In this paper a new research and development of the pressure sensors utilizing carbon nanotubes (CNTs) arrays as the electron source in emission sensor or as the surface increase element in capacitance sensor are presented. Both sensors consisted of the two parts; elastic electrode-sensing film fabricated by wet anisotropic etching process and solid electrode. The emission sensor has elastic anode electrode with membrane and multi-wall carbon nanotubes (MWCNTs) arrays cathode in the vacuum chamber. The capacitance sensor has the same topology extensive by CNT on both electrodes without vacuum chamber. The MWCNTs were grown by plasma enhanced chemical vapour deposition (PECVD).

English abstract

In this paper a new research and development of the pressure sensors utilizing carbon nanotubes (CNTs) arrays as the electron source in emission sensor or as the surface increase element in capacitance sensor are presented. Both sensors consisted of the two parts; elastic electrode-sensing film fabricated by wet anisotropic etching process and solid electrode. The emission sensor has elastic anode electrode with membrane and multi-wall carbon nanotubes (MWCNTs) arrays cathode in the vacuum chamber. The capacitance sensor has the same topology extensive by CNT on both electrodes without vacuum chamber. The MWCNTs were grown by plasma enhanced chemical vapour deposition (PECVD).

Keywords

carbon nanotubes, field emission, pressure sensor

RIV year

2007

Released

20.09.2007

Publisher

Ing. Zdeněk Novotný CSc., Brno, Ondráčkova 105

Location

Brno

ISBN

978-80-214-3470-7

Book

EDS 07 IMAPS CS INTERNATIONAL CONFERENCE PROCEEDING

Edition number

první

Pages from

178

Pages to

182

Pages count

5

Documents

BibTex 


@inproceedings{BUT27858,
  author="Richard {Ficek} and Radimír {Vrba} and Ondřej {Jašek} and Marek {Eliáš} and Lenka {Zajíčková}",
  title="Carbon nanotubes in pressure sensors",
  annote="In this paper a new research and development of the pressure sensors utilizing carbon
nanotubes (CNTs) arrays as the electron source in emission sensor or as the surface
increase element in capacitance sensor are presented. Both sensors consisted of the
two parts; elastic electrode-sensing film fabricated by wet anisotropic etching
process and solid electrode. The emission sensor has elastic anode electrode with
membrane and multi-wall carbon nanotubes (MWCNTs) arrays cathode in the
vacuum chamber. The capacitance sensor has the same topology extensive by CNT
on both electrodes without vacuum chamber. The MWCNTs were grown by plasma
enhanced chemical vapour deposition (PECVD).",
  address="Ing. Zdeněk Novotný CSc., Brno, Ondráčkova 105",
  booktitle="EDS 07 IMAPS CS INTERNATIONAL CONFERENCE PROCEEDING",
  chapter="27858",
  institution="Ing. Zdeněk Novotný CSc., Brno, Ondráčkova 105",
  year="2007",
  month="september",
  pages="178--182",
  publisher="Ing. Zdeněk Novotný CSc., Brno, Ondráčkova 105",
  type="conference paper"
}