Publication detail

Screen-printed films for sensor microsystems

IVANOV, P., HUBÁLEK, J.

Original Title

Screen-printed films for sensor microsystems

Type

conference paper

Language

English

Original Abstract

By means of an adapted screen-printing technique, sensitive layers of tin and tungsten oxide (pure and doped with 1% in weight of Au, Pt and Pd) were deposited on silicon micromachined substrates with low thermal inertia. Each chip contains four membranes with different active layers. The sensor response to ethylene, ethanol, amonia and thein bojary mixtures was studied. It is shown that these species can be easily discriminated, even at low concentrations (1ppm), which makes the micro array designed suitable to monitor climacteric fruit dutiny storage in warehouses or storage chambers.

Keywords

Micro-hot plate sensor arrays; Noble metal loading; Thick-film metal oxide gas sensors; Ethylene monitoring

Authors

IVANOV, P., HUBÁLEK, J.

Released

16. 10. 2006

Publisher

Chania, Crete Institute of Technology, Greece

ISBN

960-8025-99-8

Book

Socrates International Conference. Electronic System Design 2006.

Pages from

67

Pages to

71

Pages count

5

BibTex

@inproceedings{BUT24424,
  author="Jaromír {Hubálek}",
  title="Screen-printed films for sensor microsystems",
  booktitle="Socrates International Conference. Electronic System Design 2006.",
  year="2006",
  pages="5",
  publisher="Chania, Crete Institute of Technology, Greece",
  isbn="960-8025-99-8"
}