Publication detail

Optimization of secondary electron detection by segmental ionization detector in environmental SEM

Černoch, P., Jirák, J.

Original Title

Optimization of secondary electron detection by segmental ionization detector in environmental SEM

Type

conference paper

Language

English

Original Abstract

The article deals with a prezentation of results of optimization of secondary electron detection by an ionization detector in the environmental scanning electron microscope. The ionization detectors consisting of a varied electrode geometry and varied voltages on these electrodes, named segmental ionization detectors, are presented as a possibility to reach desired contrasts in a specimen image. In this work, images acquired by several detectors demonstrate detection of different types of signal electrons utilizing a specimen containing thin surface layers and a specimen made for a material contrast measurement. The segmental ionization detector optimized for true secondary electron detection is in the main focus.

Keywords

Environmental scanning electron microscope, secondary electrons, segmental ionization detector.

Authors

Černoch, P., Jirák, J.

RIV year

2007

Released

1. 1. 2007

Publisher

Czechoslovak Microscopy Society

ISBN

978-80-239-9397-4

Book

Proceedings of the 8th Multinational Congress on Microscopy

Edition number

1

Pages from

79

Pages to

80

Pages count

2

BibTex

@inproceedings{BUT23831,
  author="Pavel {Černoch} and Josef {Jirák}",
  title="Optimization of secondary electron detection by segmental ionization detector in environmental SEM",
  booktitle="Proceedings of the 8th Multinational Congress on Microscopy",
  year="2007",
  number="1",
  pages="2",
  publisher="Czechoslovak Microscopy Society",
  isbn="978-80-239-9397-4"
}