Publication detail

Zdroj pro Pulsní Magnetronové Naprašování.

Original Title

Zdroj pro Pulsní Magnetronové Naprašování.

Czech Title

Zdroj pro Pulsní Magnetronové Naprašování.

Language

cs

Original Abstract

An experimental pulse power supply source for magnetron pulse sputtering has been designed and built. Maximal mean power is 750 W with peak power capability up to 3 kW. The testing was performed on the own design magnetron sputterinng device with good cooling capability. Cathode voltage and cathode current were recorded during the ON-Pulse and during the OFF-Pulse. Operating at low frequency range the magnetron voltage seemed to have square-wave characteristics. Monitoring the target current and voltage waveforms during pulse operation shows that transient spikes occure and the waveforms differ from this idealized behavior. At the beginning of the ON-Pulse, there is a voltage spike which brings high energy electrons into the magnetron discharge. Because the discharge current is low in the starting part of the ON-Pulse species created in this time are supposed to be more favorable for the generation of radicals than for sputtering. During the Off-Pulse the discharge current first decays rapidly and later more slowly to zero, but it is not falling to zero when the Off-Pulse is shorter than 10 microseconds about. This two-step decay of the magnetron current indicate the presence of two groups of electrons in a magnetron plasma. There are fast electrons generated by electric field and bulk electrons confined in the plasma volume.

Czech abstract

An experimental pulse power supply source for magnetron pulse sputtering has been designed and built. Maximal mean power is 750 W with peak power capability up to 3 kW. The testing was performed on the own design magnetron sputterinng device with good cooling capability. Cathode voltage and cathode current were recorded during the ON-Pulse and during the OFF-Pulse. Operating at low frequency range the magnetron voltage seemed to have square-wave characteristics. Monitoring the target current and voltage waveforms during pulse operation shows that transient spikes occure and the waveforms differ from this idealized behavior. At the beginning of the ON-Pulse, there is a voltage spike which brings high energy electrons into the magnetron discharge. Because the discharge current is low in the starting part of the ON-Pulse species created in this time are supposed to be more favorable for the generation of radicals than for sputtering. During the Off-Pulse the discharge current first decays rapidly and later more slowly to zero, but it is not falling to zero when the Off-Pulse is shorter than 10 microseconds about. This two-step decay of the magnetron current indicate the presence of two groups of electrons in a magnetron plasma. There are fast electrons generated by electric field and bulk electrons confined in the plasma volume.

BibTex


@inproceedings{BUT20908,
  author="Jaroslav {Boušek}",
  title="Zdroj pro Pulsní Magnetronové Naprašování.",
  annote="An experimental pulse power supply source for magnetron pulse sputtering has been designed and built. Maximal mean power is 750 W with peak power capability up to 3 kW. The testing was performed on the own design magnetron sputterinng device with good cooling capability. Cathode voltage and cathode current were recorded during the ON-Pulse and during the OFF-Pulse. Operating at low frequency range the magnetron voltage seemed to have square-wave characteristics. Monitoring the target current and voltage waveforms during pulse operation shows that transient spikes occure and the waveforms differ from this idealized behavior. At the beginning of the ON-Pulse, there is a voltage spike which brings high energy electrons into the magnetron discharge. Because the discharge current is low in the starting part of the ON-Pulse species created in this time are supposed to be more favorable for the generation of radicals than for sputtering. During the Off-Pulse the discharge current first decays rapidly and later more slowly to zero, but it is not falling to zero when the Off-Pulse is shorter than 10 microseconds about. This two-step decay of the magnetron current indicate the presence of two groups of electrons in a magnetron plasma. There are fast electrons generated by electric field and bulk electrons confined in the plasma volume.",
  address="Nakl. Novotný",
  booktitle="Mikrosyn. Nové trendy v mikroelektronických systémech a nanotechnologiích. Sborník seminare. Brno 12.12.2005",
  chapter="20908",
  institution="Nakl. Novotný",
  year="2005",
  month="december",
  pages="105",
  publisher="Nakl. Novotný",
  type="conference paper"
}