Publication detail

Precise process monitoring system for anisotropic etching

Kadlec, J., Kolařík, V.

Original Title

Precise process monitoring system for anisotropic etching

English Title

Precise process monitoring system for anisotropic etching

Type

conference paper

Language

en

Original Abstract

This paper covers precise monitoring system for monolithic tungsten wire manufacture. This device is designed in order to analyze and control optimal cathode etching process. Main function of this control unit is to control position system, measure etching current and temperature and control cathode etching process.

English abstract

This paper covers precise monitoring system for monolithic tungsten wire manufacture. This device is designed in order to analyze and control optimal cathode etching process. Main function of this control unit is to control position system, measure etching current and temperature and control cathode etching process.

RIV year

2005

Released

21.07.2005

Publisher

Technological Institute of Chania

Location

Greece

ISBN

80-214-3042-7

Book

Socrates Workshop Intensive Training Programme in Electronic Systeme Design Proceedings.

Pages from

152

Pages to

154

Pages count

3

BibTex


@inproceedings{BUT20666,
  author="Jaroslav {Kadlec} and Vladimír {Kolařík}",
  title="Precise process monitoring system for anisotropic etching",
  annote="This paper covers precise monitoring system for monolithic tungsten wire manufacture. This device is designed in order to analyze and control optimal cathode etching process. Main function of this control unit is to control position system, measure etching current and temperature and control cathode etching process.",
  address="Technological Institute of Chania",
  booktitle="Socrates Workshop Intensive Training Programme in Electronic Systeme Design Proceedings.",
  chapter="20666",
  institution="Technological Institute of Chania",
  year="2005",
  month="july",
  pages="152",
  publisher="Technological Institute of Chania",
  type="conference paper"
}