Publication detail

Influence of Specimen Size on Ionization Detector Signal Detection

Černoch, P.

Original Title

Influence of Specimen Size on Ionization Detector Signal Detection

Type

conference paper

Language

English

Original Abstract

The article deals with the influence of the specimen size on the signal detection by the ionization detector in environmental scanning electron microscope. Results of the computer simulations and the experimental data are used for understanding a relation between the detected signal and the specimen size.

Keywords

ionization detector, contrast, electrostatic field

Authors

Černoch, P.

RIV year

2005

Released

2. 1. 2005

Publisher

Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií, Fakulta informačních technologií a Fakulta strojního inženýrství

Location

Brno

ISBN

80-214-2942-9

Book

HONEYWELL EMI 2005 Proceedings of the International Interdisciplinary Student Competition and Conference

Edition number

1

Pages from

166

Pages to

170

Pages count

5

BibTex

@inproceedings{BUT17666,
  author="Pavel {Černoch}",
  title="Influence of Specimen Size on Ionization Detector Signal Detection",
  booktitle="HONEYWELL EMI 2005 Proceedings of the International Interdisciplinary Student Competition and Conference",
  year="2005",
  volume="1",
  number="1",
  pages="5",
  publisher="Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií, Fakulta informačních technologií a Fakulta strojního inženýrství",
  address="Brno",
  isbn="80-214-2942-9"
}