Publication detail

Design and performance of a test rig for evaluation of nanopositioning stages

YACOOT, A. KLAPETEK, P. VALTR, M. GROLICH, P. DONGMO, H. LAZZERINI, M. BRIDGES, A.

Original Title

Design and performance of a test rig for evaluation of nanopositioning stages

Type

journal article in Web of Science

Language

English

Original Abstract

Nanopositioning stages are used in many areas of nanotechnology and advanced materials analysis, often being integrated into analytical devices such as scanning probe and optical microscopes and manufacturing devices (e.g. lithographic systems). We present a metrological instrument, together with software, designed for traceable evaluation of stage performance. The system capabilities and performance are illustrated by measurement of stages of different levels of accuracy, including a low cost custom built stage manufactured by 3D printing. The traceability of the system is described and main uncertainty sources are discussed. Guidelines are given for the specification of stage performance.

Keywords

multi-axis positioning stages; traceability; nanopositioning; dimensional metrology

Authors

YACOOT, A.; KLAPETEK, P.; VALTR, M.; GROLICH, P.; DONGMO, H.; LAZZERINI, M.; BRIDGES, A.

Released

7. 2. 2019

Publisher

IOP PUBLISHING LTD

Location

BRISTOL

ISBN

1361-6501

Periodical

Measurement Science and Technology

Year of study

30

Number

3

State

United Kingdom of Great Britain and Northern Ireland

Pages from

1

Pages to

10

Pages count

10

URL

https://iopscience.iop.org/article/10.1088/1361-6501/aafd03

BibTex

@article{BUT160891,
  author="Andrew {Yacoot} and Petr {Klapetek} and Miroslav {Valtr} and Petr {Grolich} and Herve {Dongmo} and Mattia {Lazzerini} and Angus {Bridges}",
  title="Design and performance of a test rig for evaluation of nanopositioning stages",
  journal="Measurement Science and Technology",
  year="2019",
  volume="30",
  number="3",
  pages="1--10",
  doi="10.1088/1361-6501/aafd03",
  issn="1361-6501",
  url="https://iopscience.iop.org/article/10.1088/1361-6501/aafd03"
}