Publication detail

UTILIZATION OF MEMS ACCELEROMETERS IN VIBRODIAGNOSTICS

DOSEDĚL, M. KREJČÍ, J. BENEŠ, P. HAVRÁNEK, Z.

Original Title

UTILIZATION OF MEMS ACCELEROMETERS IN VIBRODIAGNOSTICS

English Title

UTILIZATION OF MEMS ACCELEROMETERS IN VIBRODIAGNOSTICS

Type

conference paper

Language

en

Original Abstract

In the present time traditional piezoelectric accelerometers are mostly used in the industrial environment. Mechanical size and relatively higher price of the sensors can impede their mass application in the diagnostics of machines. In the past, MEMS sensors were inappropriate for small signals measurement due to their own, relatively high, output noise level. But the development of MEMS structures is improving. Main parameters, such as price, frequency range, dynamic range, but mainly ultralow noise density represent significant role in the potential mass usage of the MEMS accelerometers in the vibrodiagnostics field. Ultralow noise MEMS accelerometers manufactured by Analog Devices, Colibrys and Silicon Designs were selected and output noise was measured. Rough data from accelerometer were re-scaled and integrated from acceleration to velocity domain and filtered – from wide-band range to ISO range. Based on the results, comparison with traditional piezoelectric industrial accelerometers was done. The noise of measured MEMS accelerometers is from 0.0029 mm/s to 0.022 mm/s, which is comparable to the piezo sensors noise level. MEMS sensors are useful for measuring of themachines under the conditions defined in standard ISO 10816.

English abstract

In the present time traditional piezoelectric accelerometers are mostly used in the industrial environment. Mechanical size and relatively higher price of the sensors can impede their mass application in the diagnostics of machines. In the past, MEMS sensors were inappropriate for small signals measurement due to their own, relatively high, output noise level. But the development of MEMS structures is improving. Main parameters, such as price, frequency range, dynamic range, but mainly ultralow noise density represent significant role in the potential mass usage of the MEMS accelerometers in the vibrodiagnostics field. Ultralow noise MEMS accelerometers manufactured by Analog Devices, Colibrys and Silicon Designs were selected and output noise was measured. Rough data from accelerometer were re-scaled and integrated from acceleration to velocity domain and filtered – from wide-band range to ISO range. Based on the results, comparison with traditional piezoelectric industrial accelerometers was done. The noise of measured MEMS accelerometers is from 0.0029 mm/s to 0.022 mm/s, which is comparable to the piezo sensors noise level. MEMS sensors are useful for measuring of themachines under the conditions defined in standard ISO 10816.

Keywords

MEMS, accelerometer, noise level, low noise accelerometers

Released

12.07.2018

Location

Hiroshima

ISBN

978-83-7880-552-6

Book

Proceedings of the 25th International Congress on Sound and Vibration

Pages from

1

Pages to

7

Pages count

7

Documents

BibTex


@inproceedings{BUT150473,
  author="Martin {Doseděl} and Jakub {Krejčí} and Petr {Beneš} and Zdeněk {Havránek}",
  title="UTILIZATION OF MEMS ACCELEROMETERS IN VIBRODIAGNOSTICS",
  annote="In the present time traditional piezoelectric accelerometers are mostly used in the industrial environment. Mechanical size and relatively higher price of the sensors can impede their mass application in the diagnostics of machines. In the past, MEMS sensors were inappropriate for small signals measurement due to their own, relatively high, output noise level. But the development of MEMS structures is improving. Main parameters, such as price, frequency range, dynamic range, but mainly ultralow noise density represent significant role in the potential mass usage of the MEMS accelerometers in the vibrodiagnostics field. Ultralow noise MEMS accelerometers manufactured by Analog Devices, Colibrys and Silicon Designs were selected and output noise was measured. Rough data from accelerometer were re-scaled and integrated from acceleration to velocity
domain and filtered – from wide-band range to ISO range. Based on the results, comparison with traditional piezoelectric industrial accelerometers was done. The noise of measured MEMS accelerometers is from 0.0029 mm/s to 0.022 mm/s, which is comparable to the piezo sensors noise level. MEMS sensors are useful for measuring of themachines under the conditions defined in standard ISO 10816.",
  booktitle="Proceedings of the 25th International Congress on Sound and Vibration",
  chapter="150473",
  howpublished="electronic, physical medium",
  year="2018",
  month="july",
  pages="1--7",
  type="conference paper"
}