Publication detail

SPM methods for nanotechnology

Jaroslav Kala

Original Title

SPM methods for nanotechnology

English Title

SPM methods for nanotechnology

Type

conference paper

Language

en

Original Abstract

The paper describes two methods from SPM (Scanning Probe Microscopy) family and their junction. First part is dealing with common description of STM (Scanning Tunneling Microscopy) method and its advantages and disadvantages. Two modes of TS 3130 modified STM are described. The 3D processing and its benefit for defectoscopy and SPM methods are studied. The details about SNOM (Scanning Near-field Optical Microscopy) method, its advantages and disadvantages in the local nondestructive measurement are also presented

English abstract

The paper describes two methods from SPM (Scanning Probe Microscopy) family and their junction. First part is dealing with common description of STM (Scanning Tunneling Microscopy) method and its advantages and disadvantages. Two modes of TS 3130 modified STM are described. The 3D processing and its benefit for defectoscopy and SPM methods are studied. The details about SNOM (Scanning Near-field Optical Microscopy) method, its advantages and disadvantages in the local nondestructive measurement are also presented

Keywords

SPM, STM, SNOM, nanotechnology

RIV year

2005

Released

14.08.2005

Publisher

University of Miskolc, Hungary

ISBN

9636616735

Book

5th INTERNATIONAL CONFERENCE OF PHD STUDENTS

Edition

1

Edition number

1

Pages from

79

Pages to

84

Pages count

6

BibTex


@inproceedings{BUT14972,
  author="Jaroslav {Kala}",
  title="SPM methods for nanotechnology",
  annote="The paper describes two methods from SPM (Scanning Probe Microscopy) family and their junction. First part is dealing with common description of STM (Scanning Tunneling Microscopy) method and its advantages and disadvantages. Two modes of  TS 3130 modified STM are described. The 3D processing and its benefit for defectoscopy and SPM methods are studied. The details about SNOM (Scanning Near-field Optical Microscopy) method, its advantages and disadvantages in the local nondestructive measurement are also presented",
  address="University of Miskolc, Hungary",
  booktitle="5th INTERNATIONAL CONFERENCE OF PHD STUDENTS",
  chapter="14972",
  edition="1",
  institution="University of Miskolc, Hungary",
  year="2005",
  month="august",
  pages="79",
  publisher="University of Miskolc, Hungary",
  type="conference paper"
}