Publication detail

Micromorphology of AlN Epilayers on Sapphire Substrates

TALU, S. SOBOLA, D. TOMÁNEK, P. STACH, S.

Original Title

Micromorphology of AlN Epilayers on Sapphire Substrates

Type

conference paper

Language

English

Original Abstract

The purpose of this paper was to describe the 3D nano-scaled surface topography of the aluminum nitride on sapphire. The structures were prepared by magnetron sputtering with heating of the sapphire substrate. The dependence of the layers topography on the substrate temperature was presented. Surface appearance was studied by atomic force microscopy (AFM). The quantitative topography data from AFM were used for surface characterization by fractal analysis and statistical parameters. The results of fractal analysis show the correlation of fractal dimension and statistical characteristics of surface topography. The data may contribute to manufacture of AlN thin films with desired surface characteristics.

Keywords

Aluminum nitride, Atomic force microscopy, Fractal analysis, Minkowsky functionals, Surface micromorphology

Authors

TALU, S.; SOBOLA, D.; TOMÁNEK, P.; STACH, S.

Released

20. 10. 2017

Publisher

DEStech Publications, Inc.

Location

439 North Duke Street Lancaster, Pennsylvania 17602 U.S.A.

ISBN

978-1-60595-476-9

Book

DEStech Transactions on Computer Science and Engineering

Edition

Proceedings CECE 2017

ISBN

2475-8841

Periodical

DEStech Transactions on Computer Science and Engineering

State

United States of America

Pages from

465

Pages to

470

Pages count

6

URL

http://dpi-proceedings.com/index.php/dtcse/issue/view/157

BibTex

@inproceedings{BUT140588,
  author="Stefan {Talu} and Dinara {Sobola} and Pavel {Tománek} and Sebastian {Stach}",
  title="Micromorphology of AlN Epilayers on Sapphire Substrates",
  booktitle="DEStech Transactions on Computer Science and Engineering",
  year="2017",
  series="Proceedings CECE 2017",
  journal="DEStech Transactions on Computer Science and Engineering",
  pages="465--470",
  publisher="DEStech Publications, Inc.",
  address="439 North Duke Street 
Lancaster, Pennsylvania 17602 U.S.A.",
  doi="10.12783/dtcse/cece2017/14582",
  isbn="978-1-60595-476-9",
  issn="2475-8841",
  url="http://dpi-proceedings.com/index.php/dtcse/issue/view/157"
}