Publication detail

Optical pressure sensors in LTCC technology

SOMER, J.

Original Title

Optical pressure sensors in LTCC technology

English Title

Optical pressure sensors in LTCC technology

Type

conference paper

Language

en

Original Abstract

This paper deals with the design, manufacturing and measurement of optical pressure sensors developed in Low Temperature Co-fired Ceramic technology. Two types of the optical measurement methods were used for the pressure sensing. The first method is based on the distance measurement using Fabry Perot resonator. The second type of pressure transducer is based on the change of the light spectrum reflected from the Fiber Bragg Grating integrated in the sensor. LTCC ceramic structure with membrane was used for the forming of a pressure transducer. Both of the sensor types were designed to measure pressure in range of ± 0,5 bar difference atmospheric pressure.

English abstract

This paper deals with the design, manufacturing and measurement of optical pressure sensors developed in Low Temperature Co-fired Ceramic technology. Two types of the optical measurement methods were used for the pressure sensing. The first method is based on the distance measurement using Fabry Perot resonator. The second type of pressure transducer is based on the change of the light spectrum reflected from the Fiber Bragg Grating integrated in the sensor. LTCC ceramic structure with membrane was used for the forming of a pressure transducer. Both of the sensor types were designed to measure pressure in range of ± 0,5 bar difference atmospheric pressure.

Keywords

Low Temperature Co-fired Ceramic, pressure sensors, Fabry-Perot resonator, Fiber Bragg Grating

Released

24.05.2017

ISBN

978-80-214-5496-5

Book

Proceedings of the 23rd Conference STUDENT EEICT 2017

Pages from

552

Pages to

556

Pages count

707

BibTex


@inproceedings{BUT138615,
  author="Jakub {Somer}",
  title="Optical pressure sensors in LTCC technology",
  annote="This paper deals with the design, manufacturing and measurement of optical pressure sensors developed in Low Temperature Co-fired Ceramic technology. Two types of the optical measurement methods were used for the pressure sensing. The first method is based on the distance measurement using Fabry Perot resonator. The second type of pressure transducer is based on the change of the light spectrum reflected from the Fiber Bragg Grating integrated in the sensor. LTCC ceramic structure with membrane was used for the forming of a pressure transducer. Both of the sensor types were designed to measure pressure in range of ± 0,5 bar difference atmospheric pressure.",
  booktitle="Proceedings of the 23rd Conference STUDENT EEICT 2017",
  chapter="138615",
  howpublished="print",
  year="2017",
  month="may",
  pages="552--556",
  type="conference paper"
}