Publication detail

Nanosensor array systems based on single functional wires selectively integrated and their sensing properties to C2H6O and NO2

CHMELA, O. SADÍLEK, J. SAMÀ, J. ROMANO-RODRIGUEZ, A. VALLEJOS VARGAS, S. HUBÁLEK, J.

Original Title

Nanosensor array systems based on single functional wires selectively integrated and their sensing properties to C2H6O and NO2

English Title

Nanosensor array systems based on single functional wires selectively integrated and their sensing properties to C2H6O and NO2

Type

conference paper

Language

en

Original Abstract

Nanosensors systems comprised of an array of parallel-connected single-nanowires across electrodes with finger-widths, closely related to the diameter of gas sensitive WO3 nanowire are developed. The processing steps for the fabrication of these systems include electron-beam lithography, direct writing laser lithography, metallization, etching, dielectrophoresis, and aerosol assisted chemical vapour deposition, among others. The functionality of these systems in resistive configuration towards ethanol and nitrogen dioxide is evaluated. Results indicate higher sensor responses at 250°C and less signal to noise by applying constant currents of 50 nA. For these conditions, the sensor systems demonstrate reproducible responses to each analyte, with higher response to low concentrations of nitrogen dioxide (0.2, 1, 2.5 ppm), as opposed to ethanol (2.5, 10, 100 ppm), and in line with the literature.

English abstract

Nanosensors systems comprised of an array of parallel-connected single-nanowires across electrodes with finger-widths, closely related to the diameter of gas sensitive WO3 nanowire are developed. The processing steps for the fabrication of these systems include electron-beam lithography, direct writing laser lithography, metallization, etching, dielectrophoresis, and aerosol assisted chemical vapour deposition, among others. The functionality of these systems in resistive configuration towards ethanol and nitrogen dioxide is evaluated. Results indicate higher sensor responses at 250°C and less signal to noise by applying constant currents of 50 nA. For these conditions, the sensor systems demonstrate reproducible responses to each analyte, with higher response to low concentrations of nitrogen dioxide (0.2, 1, 2.5 ppm), as opposed to ethanol (2.5, 10, 100 ppm), and in line with the literature.

Keywords

NOx ; Nanosensors ; Sensors ; Lithography ; Bioalcohols ; Chemical vapor deposition ; Dielectrophoresis ; Electrodes ; Electron beams ; Etching

Released

20.06.2017

Publisher

SPIE Nanotechnology VIII

Location

Barcelona, Spain

ISBN

9781510609976

Book

Proc. SPIE 10248, Nanotechnology VIII

Edition

Volume 10248

Pages from

1

Pages to

7

Pages count

7

BibTex


@inproceedings{BUT136430,
  author="Ondřej {Chmela} and Jakub {Sadílek} and Stella {Vallejos Vargas} and Jaromír {Hubálek}",
  title="Nanosensor array systems based on single functional wires selectively integrated and their sensing properties to C2H6O and NO2",
  annote="Nanosensors systems comprised of an array of parallel-connected single-nanowires across electrodes with finger-widths, closely related to the diameter of gas sensitive WO3 nanowire are developed. The processing steps for the fabrication of these systems include electron-beam lithography, direct writing laser lithography, metallization, etching, dielectrophoresis, and aerosol assisted chemical vapour deposition, among others. The functionality of these systems in resistive configuration towards ethanol and nitrogen dioxide is evaluated. Results indicate higher sensor responses at 250°C and less signal to noise by applying constant currents of 50 nA. For these conditions, the sensor systems demonstrate reproducible responses to each analyte, with higher response to low concentrations of nitrogen dioxide (0.2, 1, 2.5 ppm), as opposed to ethanol (2.5, 10, 100 ppm), and in line with the literature.",
  address="SPIE Nanotechnology VIII",
  booktitle="Proc. SPIE  10248, Nanotechnology VIII",
  chapter="136430",
  doi="10.1117/12.2265000",
  edition="Volume 10248",
  howpublished="online",
  institution="SPIE Nanotechnology VIII",
  number="102480F-1",
  year="2017",
  month="june",
  pages="1--7",
  publisher="SPIE Nanotechnology VIII",
  type="conference paper"
}