Publication detail

Determination of local thickness values of non-uniform thin films by imaging spectroscopic reflectometer with enhanced spatial resolution

VODÁK, J. NEČAS, D. OHLÍDAL, M. OHLÍDAL, I.

Original Title

Determination of local thickness values of non-uniform thin films by imaging spectroscopic reflectometer with enhanced spatial resolution

Type

journal article in Web of Science

Language

English

Original Abstract

In this paper an imaging spectroscopic reflectometer with enhanced spatial resolution is presented. Main features of its design, experimental data acquisition, i.e. maps of thin film spectral dependencies of local reflectance and the local thickness map determination are described. The ability of this instrument to characterize thin film thickness non-uniformity with high gradients is demonstrated on measurements of thin film edges. A comparison with an older device is also presented.

Keywords

enhanced spatial resolution, high gradient thickness distribution, imaging spectroscopic reflectometer, non-uniform thin films

Authors

VODÁK, J.; NEČAS, D.; OHLÍDAL, M.; OHLÍDAL, I.

Released

12. 1. 2017

Publisher

IOP Publishing

ISBN

0957-0233

Periodical

Measurement Science and Technology

Year of study

28

Number

2

State

United Kingdom of Great Britain and Northern Ireland

Pages from

025205

Pages to

025205-6

Pages count

6

URL

http://iopscience.iop.org/article/10.1088/1361-6501/aa5534