Publication detail

Comparison of Dry and Wet Oxidation Process during Low Pressure Boron Diffusion with BBr3 in Solar Cell Production

MOJROVÁ, B. MIHAILETCHI, V.

Original Title

Comparison of Dry and Wet Oxidation Process during Low Pressure Boron Diffusion with BBr3 in Solar Cell Production

Type

conference paper

Language

English

Original Abstract

Replacing a dry oxidation with a wet oxidation process during low pressure diffusion using boron tribromide (BBr3) in solar cell production

Keywords

Boron diffusion, Solar Cell

Authors

MOJROVÁ, B.; MIHAILETCHI, V.

RIV year

2015

Released

23. 4. 2015

Publisher

Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií

Location

Brno

ISBN

978-80-214-5148-3

Book

Proceedings of the 21st Conference STUDENT EEICT 2015

Pages from

376

Pages to

380

Pages count

5

BibTex

@inproceedings{BUT114194,
  author="Barbora {Mojrová} and Valentin {Mihailetchi}",
  title="Comparison of Dry and Wet Oxidation Process during Low Pressure Boron Diffusion with BBr3 in Solar Cell Production",
  booktitle="Proceedings of the 21st Conference STUDENT EEICT 2015",
  year="2015",
  pages="376--380",
  publisher="Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií",
  address="Brno",
  isbn="978-80-214-5148-3"
}