Very low energy scanning transmission electron microscopy

conference paper

English

Combined SLEEM/scanning low energy transmission electron microscope (SLETEM) uses a cathode lens to decelerate the electron beam just in front of the specimen surface, and is able to reach a resolution of a few nm even at a landing energy of a few eV. This provides the flexibility to investigate the transmission of electrons through thin samples at electron energies as low as 1 eV.

SLETEM, SLEEM, IMFP, SEM,

HRNČIŘÍK, P., MULLEROVÁ, I.

1. 1. 2004

EMC 2004

Antwerpy, Belgie

P02

2