Product detail

AACVD reactor

VALLEJOS VARGAS, S. HUBÁLEK, J. PRÁŠEK, J. PYTLÍČEK, Z.

Product type

funkční vzorek

Abstract

The AACVD reactor was built to produce laboratory samples (2 x 2 cm) of nanostructured metal oxide films from metal organic precursors. The reactor can reach deposition temperatures up to 700 degC and it is designed to work with aerosol carrier flows between 0 and 500 sccm.

Keywords

Aerosol assited CVD, metal oxides

Create date

21.11.2014

Location

Centrum SIX, Technická 3058/10, Brno

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