Publication detail

SEM Characterization of Carbon Nanotubes Based Active Layers of Chemical Sensors

KNÁPEK, A. MIKA, F. PRÁŠEK, J. MAJZLÍKOVÁ, P.

Original Title

SEM Characterization of Carbon Nanotubes Based Active Layers of Chemical Sensors

Type

conference paper

Language

English

Original Abstract

Characterization method for active layers for microelectrodes of electrochemical and gas sensors using scanning electron microscopy (SEM) is presented. In order to achieve maximum sensitivity and selectivity of the sensor, it is necessary to obtain precise knowledge of electrode's surface. Characterization was made using FEI Magellan SEM equipped with TLD secondary electron (SE) and CBS back-scattered electron (BSE) detectors, Energy-dispersive X-ray spectroscopy (EDS) and beam deceleration system. SEM at lower energies offers several advantages, among them the most important are: increase of material contrast, high ratio SE, BSE signal and noise, smaller interaction volume and elimination of charging effects.

Keywords

chemical sensors, MWCNTs active layer, SEM, characterization

Authors

KNÁPEK, A.; MIKA, F.; PRÁŠEK, J.; MAJZLÍKOVÁ, P.

RIV year

2014

Released

7. 5. 2014

Publisher

Institute of Electrical and Electronics Engineers Inc.

ISBN

978-1-4799-4455-2

Book

37th International Spring Seminar on Electronics Technology

Edition

1

Edition number

1

Pages from

361

Pages to

364

Pages count

4

BibTex

@inproceedings{BUT109741,
  author="Alexandr {Knápek} and Filip {Mika} and Jan {Prášek} and Petra {Majzlíková}",
  title="SEM Characterization of Carbon Nanotubes Based Active Layers of Chemical Sensors",
  booktitle="37th International Spring Seminar on Electronics Technology",
  year="2014",
  series="1",
  number="1",
  pages="361--364",
  publisher="Institute of Electrical and Electronics Engineers Inc.",
  doi="10.1109/ISSE.2014.6887625",
  isbn="978-1-4799-4455-2"
}