Publication detail

Comparison of imaging with SE ionisation and BSE scintillation detector in ESEM

AUTRATA, R., SCHAUER, P., NEDĚLA, V., HORKÝ, D.

Original Title

Comparison of imaging with SE ionisation and BSE scintillation detector in ESEM

Type

conference paper

Language

English

Original Abstract

Environmental scanning electron microscopy (ESEM) or low-vacuum scanning electron microscopy (LV SEM) enables the visualisation of samples in a gaseous environment at the pressure of the specimen chamber from 1 Pa to over 1000 Pa. Detection of signal electrons, namely secondary electrons (SE) cannot be realised in a gaseous environment of the specimen chamber in the same way as for the high vacuum SEM, because high voltage of the Everhart-Thornley detector is not compatible with the conductance of the low vacuum environment [1]. For this reason, gaseous ions which are ionised by SE from the specimen are used for the detection in ESEM. For the detection of the backscattered electrons (BSES), conventional scintillation detector is the best to use.

Keywords

Comparison, SE, ionisation, BSE, scintillation, ESEM

Authors

AUTRATA, R., SCHAUER, P., NEDĚLA, V., HORKÝ, D.

Released

1. 1. 2003

Location

Pula

Pages from

487

Pages to

488

Pages count

2

URL

UPT AV ČR BRNO

BibTex

@inproceedings{BUT10733,
  author="Rudolf {Autrata} and Vilém {Neděla} and Drahomír {Horký} and Petr {Schauer}",
  title="Comparison of imaging with SE ionisation and BSE scintillation detector in ESEM",
  booktitle="Proceedings 6th Multinational Congress on Microscopy",
  year="2003",
  number="1",
  pages="2",
  address="Pula",
  url="UPT AV ČR BRNO"
}