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Course detail

Vacuum technology

Subjet code : FEKT-NVAF Faculty of Electrical Engineering and Communication 2011/2012 No prof. Ing. Jaroslav Boušek, CSc. Department of Microelectronics Master's full-time study English 4 examination 2 winter optional interdisciplinary

The study programmes with the given course

 Objective of the course – aims of the course unit: Acquirement of the knowledges about modern vacuum technics for use in electronics, in electrotechnical and mechanical industry Objective of the course – learning outcomes and competences: Basic skills and orientation in vacuum technology. Prerequisites: The subject knowledge on the Bachelor´s degree level is requested. Course contents (annotation): Gas, vapour, pressure, Kinetic theory of gases. Volume processes and transport of gas, gas diffusion and gas viscosity. The gas transport through the vacuum pipes. The surface processes, adsorption, desorption. The pumping processes, The basic principles of the gas transport. Transport and getter pumps. Pressure measurement. Thermocouple Gauges, Pirani Gauges. Ion Gauges. The basic principles of vacuum equipment design. Technological processes in low pressure gases. Teaching methods and criteria: Teaching methods depend on the type of course unit as specified in the article 7 of BUT Rules for Studies and Examinations. Assesment methods and criteria linked to learning outcomes: Laboratory practicum - 30 points; minimum 20 points. Final exam – 70 points; minimum 30 points. Course curriculum: Gas, vapour, pressure, measurement units and their relation. Basic principles and laws for the ideal gases. Boyle-Mariotte law, Gay-Lussac law. The state equation of the gas. Daltons law. Important constants. Kinetic theory of gases - basic principles. Relation between pressure, concentration and temperature of gas. The mean free path of gas molecules. The thermal velocity of the gas molecules, Maxwel-Boltzmann statistic. Volume processes and transport of gas, diffusion, viscosity of gas, thermal conductivity of gas. The gas transport through the vacuum pipes. Gas conductance of Vacuum pipes. Ohms law in gas transport. The volume and mass flow of the gas. The different mechanism of the gas transport - turbulent, viscose, molecular, effusion. The limit pressure of the vacuum equipment. Pumping speed of the vacuum pumps and its measurement, the pumping down time. The influence of leakage and gas desorption. The surface processes, adsorption, desorption, monomolecular and multimolecular layers, basic adsorption isotherms, saturated vapour pressure. The basic principles of the gas transport. Transport and getter pumps. The pumping processes. Mechanical pumps. Two Stage Mechanical pump. Roots blower. Turbo pumps. Diffusion pumps. Oil mist eliminators. Getter pumps. Ion pumps. Diode Ion pumps. Titanium sublimation pumps. Diode and Triode Ion pumps. Cryopumps. Sorption pumps. Molecular sieve . Pressure measurement (absolute and relative). Torricelli tube.U- tube. Thermocouple Gauges. Pirani Gauges. Ion Gauges. Cold Cathode Gauges. Alfatron. Penning Gauges. Design of the triode Ion Gauge. Alpert-Bayard and Helmer-Hayward tube design. The basic principles of vacuum equipment design. Technological processes in low pressure gases. Specification of controlled education, way of implementation and compensation for absences: Laboratory practicum. Numerical practicum. Recommended reading: Roth A.: Vacuum Technology, 3rd ed., North-Holland, Amsterdam (1990) ISBN: 0-444-88010-0John F. O'Hanlon : “User's guide to vacuum technology”, 3rd ed., New Jersey, John Wiley, 2003. xviii,516p. ISBN : 0-471-27052-0 Boušek J.: “Vacuum Technology”, printed lectures, 82 p, FEKT VUT v Brně, Brno (2004)

Type of course unit:
Lecture: 13 hours, optionally prof. Ing. Jaroslav Boušek, CSc. 12 hours, compulsory prof. Ing. Jaroslav Boušek, CSc. 14 hours, compulsory prof. Ing. Jaroslav Boušek, CSc.