Design of Piezoelectric Manipulators for an Application in SPM instruments

conference paper

English

In this paper piezoelectric driven devices used for translation of the samples or other components both in atmospheric and UHV environments, especially in Scanning Probe Microscopy (SPM), are reported. The fundamental view of these actuators and a design of a compact micromanipulator for an AFM/STM unit are presented

Design, Piezoelectric Manipulators, SPM instruments

PÁTÍK, K.; ŠIKOLA, T.; LOPOUR, F.

2002

15. 11. 2001

FEI VUT v Brně

Brno

80-214-1992-X

Sborník příspěvků konference Nové trendy ve fyzice

400

403

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