Publication detail

Uncooled Antenna-Coupled Microbolometer for Detection of Terahertz Radiation

RYGER, I., LOBOTKA, P., STEIGER, A., CHROMIK, S., LALIANSKY, T., RAIDA, Z., PITRA, K., ZEHETNER, J., SPANKOVA, M., GAZI, S., SOJKOVA, M. VANGO, G.

Original Title

Uncooled Antenna-Coupled Microbolometer for Detection of Terahertz Radiation

Type

journal article in Web of Science

Language

English

Original Abstract

In this contribution, we describe the design, technology, and physical parameters of antenna-coupled microbolometer, used for broadband detection of terahertz electromagnetic spectrum. This microbolometer features an application of La0.67Sr0.33MnO3 layer grown on multilayered material stack ensuring lattice matching of the sensing LSMO layer to silicon. By virtue of bulk micromachining of silicon-on-insulator substrates, the sensing structure is built on thin suspended membrane to provide weak thermal link, increasing thermal response, thus sensitivity. Additionally, it helps suppressing excitation of in-plane guided surface modes that will otherwise deteriorate the antenna radiation diagram and affect the spectral responsivity of the sensor. Finally, the operation of sensor is demonstrated using a molecular laser setup at 762 GHz (and also 1.4 THz) emission line. The parameters of the said microbolometers are analyzed in terms of response and time constant. Optimal working temperature of the detectors is about 65 degrees C.

Keywords

Microbolometer; Terahertz radiation; Log-periodic antenna; Micromachining; LSMO; Membrane

Authors

RYGER, I., LOBOTKA, P., STEIGER, A., CHROMIK, S., LALIANSKY, T., RAIDA, Z., PITRA, K., ZEHETNER, J., SPANKOVA, M., GAZI, S., SOJKOVA, M. VANGO, G.

Released

31. 3. 2021

Publisher

SPRINGER

Location

NEW YORK

ISBN

1866-6892

Periodical

Journal of infrared, millimeter and terahertz waves

Year of study

42

Number

4

State

United States of America

Pages from

462

Pages to

478

Pages count

17

URL

https://link.springer.com/article/10.1007/s10762-021-00781-y

BibTex

@article{BUT175706,
  author="Zbyněk {Raida}",
  title="Uncooled Antenna-Coupled Microbolometer for Detection of Terahertz Radiation",
  journal="Journal of infrared, millimeter and terahertz waves",
  year="2021",
  volume="42",
  number="4",
  pages="462--478",
  doi="10.1007/s10762-021-00781-y",
  issn="1866-6892",
  url="https://link.springer.com/article/10.1007/s10762-021-00781-y"
}